Aug, 31, 2024

Vol.57 No.4

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 45(6); 2012
  • Article

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KISE Journal of Korean Institute of Surface Engineering 2012;45(6):242-247. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2012.45.6.242

High Temperature Durability Amorphous ITO:Yb Films Deposited by Magnetron Co-Sputtering

  • Jung, Tae Dong;Song, Pung Keun;
    National Core Research Center for Hybrid Materials Solution, Pusan National University;Department of Materials Science and Engineering, Pusan National University;
초록

Yb-doped ITO (ITO:Yb) films were deposited on unheated non-alkali glass substrates by magnetron cosputtering using two cathodes (DC, RF) equipped with the ITO and $Yb_2O_3$ target, respectively. The composition of the ITO:Yb films was controlle

키워드 TCO;Yb-doped ITO;Amorphous ITO;Co-Sputtering;