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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 46(2); 2013
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2013;46(2):55-60. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2013.46.2.055
DC 스퍼터법과 유도결합 플라즈마 마그네트론 스퍼터법으로 증착된 수퍼하드 TiN 코팅막의 물성 비교연구
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목포대학교 신소재공학과;
초록
Superhard TiN coatings were fabricated by DC and ICP (inductively coupled plasma) assisted magnetron sputtering techniques. The effect of ICP power, ranging from 0 to 300 W, on coating microstructure, preferred orientation mechanical properties were syste
키워드 Superhard;Inductively coupled plasma;ICP power;Crystal grain size;Residual stress;