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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 46(3); 2013
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2013;46(3):99-104. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2013.46.3.099
금속 패터닝과 Blank노광을 이용한 감광성 유리의 미세가공
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한국산업기술대학교 신소재공학과;프로톰(주);프로톰(주);프로톰(주);프로톰(주);한양대학교 바이오나노학과;한국산업기술대학교 신소재공학과;
초록
The simple and cost-effective microfabrication method of photosensitive glass (PSG) using metal patterning and blank exposure was proposed. Conventional photolithography for micromachining of PSG needs a costly quartz mask which has high transmittance as
키워드 Photosensitive glass (PSG);Blank exposure;Microfabrication;Glass etching;