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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 46(3); 2013
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2013;46(3):133-138. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2013.46.3.133
유도결합 플라즈마 시스템의 수치 모델링에서 가스 분배 특성 해석
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군산대학교 공과대학 신소재공학과;
초록
We have developed a 2D axi-symmetric numerical model for an inductively coupled plasma system in order to analyze gas mixing effect through a narrow gap shower head. For frictional flow, holes of 0.5 mm diameter and 2 mm length are approximately modeled i
키워드 Numerical modeling;Inductively coupled plasma;CFD-ACE;