Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 46(4); 2013
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2013;46(4):139-144. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2013.46.4.139

진공조의 잔류산소가 입방정질화붕소 박막 합성에 미치는 영향

  • 오승근;김영만;
    전남대학교 신소재공학부;전남대학교 신소재공학부;
초록

c-BN(cubic boron nitride) is known to have extremely high hardness next to diamond, as well as very high thermal and chemical stability. The c-BN in the form of film is useful for wear resistant coatings where the application of diamond film is restricted

키워드 c-BN;$B_4C$;Oxygen addition;Base pressure;Magnetron sputtering;