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- KISE Journal of Korean Institute of Surface Engineering
- Volume 46(5); 2013
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2013;46(5):187-191. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2013.46.5.187
Characteristics of NbN Films Deposited on AISI 304 Using Inductively Coupled Plasma Assisted DC Magnetron Sputtering Method
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School of Materials Science and Engineering, University of Ulsan;Advanced Hybrid Production Technology Center, Korea Institute of Industrial Technology;School of Materials Science and Engineering, University of Ulsan;School of Materials Science and Engine
초록
Niobium nitride (NbN) films were deposited on AISI 304 stainless steels by inductively coupled plasma (ICP) assisted dc magnetron sputtering method at different ICP powers, and the effects of ICP power on the phase formation, mechanical and chemical prope
키워드 NbN thin films;Inductively coupled plasma (ICP);Reactive magnetron sputtering;