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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 46(6); 2013
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2013;46(6):283-289. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2013.46.6.283
기-액 상변화 열전달식 고온 히터 플레이트의 작동 특성과 성능에 관한 연구
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동은에이티에스;신안산대학교 기계과;
초록
The experimental study for the temperature uniformity on the wafer using liquid-vapor phase heat transfer mechanism is performed. For the experiment, the heater plate which is consist of stainless steel container, working fluid and electrical heater is de
키워드 Heater plate;Liquid-vapor phase change;Uniform temperature;Uniform heat flux;