Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 47(2); 2014
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2014;47(2):75-80. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2014.47.2.075

철강 위에 SiC 중간층을 사용한 나노결정질 다이아몬드 코팅

  • 명재우;강찬형;
    한국산업기술대학교 신소재공학과;한국산업기술대학교 신소재공학과;
초록

Nanocrystalline diamond(NCD) films on steel(SKH51) has been investigated using SiC interlayer film. SiC was deposited on SKH51 or Si wafer by RF magnetron sputter. NCD was deposited on SiC at $600^{circ}C$ for 0.5~4 h employing microwave plasma

키워드 Nanocrystalline diamond;Microwave plasma CVD;Silicon carbide;Adhesion;