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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 47(2); 2014
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2014;47(2):86-92. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2014.47.2.086
DC 스퍼터법과 비대칭 바이폴라 펄스 DC 스퍼터법으로 제작된 CrN 코팅막의 물성 비교연구
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목포대학교 신소재공학과;목포대학교 신소재공학과;
초록
The purpose of this comparative study was to investigate the properties of chromium nitride coatings deposited by asymmetric bipolar pulsed DC sputtering and DC sputtering system. Oscilloscope traces of the I-V waveforms indicate high power and high curre
키워드 Pulsed DC;Bipolar;Nanocrystalline;Chromium nitride;Microstructure;