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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 47(4); 2014
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2014;47(4):181-185. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2014.47.4.181
상온에서 증착된 IGZO 박막의 열처리 온도에 따른 특성
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LG Display 연구소;LG Display 연구소;LG Display 연구소;LG Display 연구소;LG Display 연구소;경북대학교 신소재공학부;
초록
We investigated the structural, electrical and optical characteristics of IGZO thin films deposited by a room-temperature RF reactive magnetron sputtering. The thin films deposited were annealed for 2 hours at various temperatures of 300, 400, 500 and
키워드
IGZO film;R.F. magnetron sputtering;annealing;