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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 47(6); 2014
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2014;47(6):303-310. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2014.47.6.303
구리 박막 제조중 증착 중단시 박막 결정립 크기 변화가 인장응력 방향으로의 응력 이동에 미치는 영향
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전남대학교 신소재공학부;전남대학교 신소재공학부;전남대학교 신소재공학부;
초록
In this study, the average in-situ stress in metallic thin film was measured during deposition of the Cu thin films on the Si(111) wafer and then the phenomenon of stress shift by the interruption of deposition was measured using Cu thin films. We have ob
키워드 thin film;in-situ;stress shift;grain size;E-beam Evaporation;