Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 47(6); 2014
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2014;47(6):341-346. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2014.47.6.341

PC 기판위에 증착된 SiO2/GZO박막의 전자빔 조사에너지에 따른 특성 변화

  • 허성보;박민재;정우창;김대일;차병철;
    한국생산기술연구원;한국생산기술연구원;한국생산기술연구원;울산대학교 재료공학과;한국생산기술연구원;
초록

Ga-doped ZnO (GZO) single layer and $SiO_2/GZO$ bi-layered films were deposited on Polycarbonate(PC) substrate by radio frequency magnetron sputtering. Influence of the structural, electrical, and optical properties of the films was considered.

키워드 GZO;E-beam Irradiation;$SiO_2$;Buffer layer;Optical transmittance;