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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 47(6); 2014
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2014;47(6):354-361. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2014.47.6.354
폴리실리콘용 유동층 반응기에서 탄화규소의 내구성과 적합성 연구
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한국세라믹기술원 이천분원;한국세라믹기술원 이천분원;한국세라믹기술원 이천분원;(주)실리콘밸류;
초록
In order to utilize silicon carbide (SiC) as an inner part of fluidized bed reactor (FBR) for manufacturing poly-silicon, we have carried out the thermodynamic calculation on the overall reactions including poly-silicon synthesis and compatibility of SiC
키워드 CVD;silicon carbide;fluidized bed reactor;thermodynamics;silicon granule;