Aug, 31, 2024

Vol.57 No.4

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상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 47(6); 2014
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2014;47(6):362-367. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2014.47.6.362

Dip-pen nanolithography를 위한 이중 팁을 가진 질화규소 프로브의 설계 및 제조

  • 김경호;한윤수;
    한국세라믹기술원 이천분원, 엔지니어링세라믹팀;한국세라믹기술원 이천분원, 엔지니어링세라믹팀;
초록

We report the design, fabrication of a $Si_3N_4$ probe and calculation of its mechanical properties for DPN(dip pen nanolithography), which consists of dual tips. Concept of dual tip probe is to employ individual tips on probe as either an AFM

키워드 Dual tip probe;Mechanical properties;Nanopatterning;