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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 48(1); 2015
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2015;48(1):7-10. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2015.48.1.007
대기압 플라즈마를 이용한 산화물 박막 트랜지스터 표면처리에 관한 연구
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성균관대학교 신소재공학부;성균관대학교 신소재공학부;성균관대학교 신소재공학부;
초록
Recently, oxide TFTs has attracted a lot of interests due to their outstanding properties such as excellent environmental stability, high mobility, wide-band gap energy and high transparency, and investigated through the method using vacuum system and wet
키워드 Plasma;Oxide TFT;IGZO;