Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 48(2); 2015
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2015;48(2):43-49. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2015.48.2.43

DC 펄스 마그네트론 스퍼터링으로 증착된 TiO2 박막의 특성변화에 관한 연구

  • 안은솔;허성보;김규식;정우창;박용호;박인욱;
    한국생산기술연구원;한국생산기술연구원;한국생산기술연구원;한국생산기술연구원;부산대학교 재료공학부;한국생산기술연구원;
초록

This study reports a fabrication of $TiO_2$ on the surface of dental implants by pulsed d.c. magnetron sputtering from a Ti target. A systematic investigation on the microstructure and mechanical properties of $TiO_2$ films was carri

키워드 Titanium dioxide;D.C Pulsed Magnetron Sputtering;Oxygen partial pressure;Deposition Temperature;XRD;Contact angle;FE-SEM;