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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 48(4); 2015
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2015;48(4):136-141. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2015.48.4.136
DC 스퍼터법과 비대칭 바이폴라 펄스 DC 스퍼터법으로 증착된 NbN 코팅막의 물성 비교연구
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목포대학교 신소재공학과;목포대학교 신소재공학과;
초록
The paper presents the comparative results of NbN coatings deposited by DC and pulsed DC asymmetric bipolar magnetron sputtering systems. The results show that, with the decreasing duty cycle and increasing pulse frequency, the coating morphology changes
키워드 Pulsed DC Sputtering;NbN;Asymmetric Bipolar;Duty cycle;Pulse frequency;