Aug, 31, 2024

Vol.57 No.4

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 48(5); 2015
  • Article

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KISE Journal of Korean Institute of Surface Engineering 2015;48(5):233-237. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2015.48.5.233

Al-1%Si/SiO2/PSG 적층 박막에서 potassium 게터링에 관한 연구

  • 김진영;
    광운대학교 전자재료공학과;
초록

In order to investigate the potassium (K) gettering, Al-1%Si/$SiO_2$/PSG multilevel thin films were fabricated. Al-1%Si thin films and $SiO_2$/PSG passivations were deposited by using DC magnetron sputter techniques and APCVD (atmosp

키워드 potassium;gettering;SIMS depth profiling;segregation;