학회 연락처
- +82-2-563-0935
- +82-2-558-2230
- submission@kssse.or.kr
- https://www.kssse.or.kr/
상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 48(5); 2015
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2015;48(5):245-252. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2015.48.5.245
상압 플라즈마를 이용한 무기박막의 화학기상 증착법에 대한 연구동향
-
성균관대학교 신소재공학부;성균관대학교 신소재공학부;성균관대학교 신소재공학부;
초록
In recent years, the cleaning and activation technology of surfaces using atmospheric plasma as well as the deposition technology for coating using atmospheric plasma have been demonstrated conclusively and drawn increasing industrial attention. Especiall
키워드 atmospheric plasma;deposition;precursor;SiOx;SiNx;