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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 48(6); 2015
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2015;48(6):253-259. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2015.48.6.253
Ni-Pd 합금 전해도금의 특성에 관한 연구
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한국산업기술대학교 신소재공학과;한국산업기술대학교 신소재공학과;한국산업기술대학교 신소재공학과;
초록
The test equipment becomes more important with the development of semiconductor industry. MEMS probe is an important testing component to detect the defects from the generated electric signal when it contacts the metal pad of semiconductor devices. Ni-Pd
키워드 Nickel-Palladium Alloy;Electroplating;Hardness;X-ray diffraction;Lattice parameter;Heat treatment;Sheet resistance;