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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 49(3); 2016
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2016;49(3):307-315. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2016.49.3.307
음극 아크 증착으로 제조된 AlTiN 박막의 특성
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포항산업과학연구원 소재이용연구그룹;포항산업과학연구원 소재이용연구그룹;포항산업과학연구원 소재이용연구그룹;포항산업과학연구원 소재이용연구그룹;포항산업과학연구원 소재이용연구그룹;
초록
The properties of AlTiN films by a cathodic arc deposition process have been studied. Oblique angle deposition has been applied to deposit AlTiN films. AlTiN films have been deposited on stainless steel (SUS304) and cemented carbide (WC) at a substrate te
키워드 AlTiN films;Cathodic arc deposition;Oblique angle deposition;Physical vapor deposition;Macroparticle;