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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 49(4); 2016
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2016;49(4):368-375. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2016.49.4.368
단일 합금타겟을 이용한 마크네트론 스퍼터링 공정으로 증착된 MoN-Cu 박막
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인하대학교 전기공학과;한국생산기술연구원 열처리그룹;인하대학교 전기공학과;
초록
MoN-Cu thin films were prepared to achieve appropriate properties of high hardness and low friction coefficient, which could be applied to automobile engine parts for reducing energy consumption as well as solving wear problems. Composite thin films of Mo
키워드 MoN-Cu thin films;Single alloying target;Magnetron sputtering;MA;SPS;