Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 49(5); 2016
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2016;49(5):467-471. Published online: Nov, 30, -0001

PDF

DOI : 10.5695/JKISE.2016.49.5.467

XPS와 SIMS를 이용한 PSG/SiO2/Al-1%Si 적층 박막내의 Na 게터링 분석

  • 김진영;
    광운대학교 전자재료공학과;
초록

In order to investigate the Na gettering, PSG/$SiO_2$/Al-1%Si multilevel thin films were fabricated. DC magnetron sputter techniques and APCVD (atmosphere pressure chemical vapor deposition) were utilized for the deposition of Al-1%Si thin film

키워드 Na;Segregation gettering;PSG;SIMS;XPS;