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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 50(2); 2017
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2017;50(2):55-71. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2017.50.2.55
스퍼터 ITO박막의 제조 공정 이해 및 활용
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부산대학교 재료공학부;
초록
Transparent Conductive Oxide (TCO), especially Indium Tin Oxide (ITO) films are almost prepared by DC magnetron sputtering because of the advantage of obtaining homogeneous large area coatings with high reproducibility. The purpose of this report is descr
키워드 Magnetron sputtering;ITO films;Amorphous TCO;Thermoelectric property;