Aug, 31, 2024

Vol.57 No.4

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상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 50(2); 2017
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2017;50(2):119-124. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2017.50.2.119

증착 Power의 세기와 시간에 따른 Fe-N 박막의 구조와 자성 특성

  • 한동원;박원욱;김종우;권아람;
    인제대학교 에너지융합학과;인제대학교 에너지융합학과;재료연구소;한국생산기술연구원 동남지역본부;
초록

Due to the high saturation magnetization (~2.4 T), $Fe_{16}N_2$ is interesting for the thin film application such as an actuator, data record storage and sensor etc. In this study, Fe-N thin films were deposited on Si(001) substrate with variou

키워드 DC Magnetron Sputtering;$Fe_{16}N_2$;Magnetic Property;Saturation and Remanence Magnetization;