Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
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상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 50(3); 2017
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2017;50(3):219-224. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2017.50.3.219

SIMS를 이용한 SiO2/PSG/SiO2/Al-1%Si 적층 박막내의 K 게터링 분석

  • 김진영;
    광운대학교 전자재료공학과;
초록

The K gettering in $SiO_2/PSG/SiO_2/Al-1%Si$ multilevel thin films was investigated using SIMS(secondary ion mass spectrometry) and XPS(X-ray Photoelectron Spectroscopy) analysis. DC magnetron sputter techniques and APCVD(atmosphere pressure ch

키워드 K gettering;PSG passivation;SIMS depth profile;