Aug, 31, 2024

Vol.57 No.4

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 50(4); 2017
  • Article

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KISE Journal of Korean Institute of Surface Engineering 2017;50(4):237-243. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2017.50.4.237

Characterization of RF Sputter-deposited Sodium Phosphorous Oxynitride Thin Films as a Solid-state Sodium-ion Conductor

  • Chun, Sang-Eun;
    School of Materials Sciences and Engineering, Kyungpook National University;
초록

We demonstrated the thin film deposition of sodium phosphorous oxynitride (NaPON) via RF magnetron sputtering of $Na_3PO_4$, as a solid-state Na-ion conductor similar to lithium phosphorous oxynitride (LiPON), which is a commonly used solid ele

키워드 Sodium phosphorous oxynitride (NaPON);RF magnetron sputtering;Ion conductor;Ionic conductivity;Activation energy;