Aug, 31, 2024

Vol.57 No.4

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 50(5); 2017
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2017;50(5):339-344. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2017.50.5.339

ALD-Al2O3 보호층이 적용된 CrAlSiN 코팅막의 내부식성 특성에 관한 연구

  • 만지흠;이우재;장경수;최현진;권세훈;
    부산대학교, 재료공학부;부산대학교, 재료공학부;(주)서영, 나노융합사업팀;부산테크노파크, 멤스나노부품생산센터;부산대학교, 재료공학부;
초록

Highly corrosion resistance performance of CrAlSiN coatings were obtained by applying ultrathin $Al_2O_3$ thin films using atomic layer deposition (ALD) method. CrAlSiN coatings were prepared on Cr adhesion layer/SUS304 substrates by a hybrid c

키워드 Atomic layer deposition;Corrosion;CrAlSiN hard coatings;Passivation layer;