학회 연락처
- +82-2-563-0935
- +82-2-558-2230
- submission@kssse.or.kr
- https://www.kssse.or.kr/
상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 50(5); 2017
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2017;50(5):392-397. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2017.50.5.392
고속 마이크로 외팔보 공진시험을 통한 나노스케일 티타늄 박막의 탄성계수 평가
-
동의대학교 기계자동차로봇부품공학부;
초록
The Young`s modulus of a nanoscale titanium (Ti) thin-film was evaluated using a high-speed microcantilever resonating at the megahertz frequency in the present study. A 350 nm thick Ti film was deposited on the surface of a silicon microcantilever, and t
키워드 Microcantilever;Resonance testing;Titanium;Thin film;Young`s modulus;