Aug, 31, 2024

Vol.57 No.4

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 51(2); 2018
  • Article

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KISE Journal of Korean Institute of Surface Engineering 2018;51(2):110-115. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2018.51.2.110

SIMS를 이용한 SiO2/PSG/SiO2/Al-1%Si 및 SiO2/TEOS/SiO2/Al-1%Si 적층 박막내의 Na 게터링 분석

  • 김진영;
    광운대학교 전자재료공학과;
초록

The Na low temperature gettering in $SiO_2/PSG/SiO_2/Al-1%Si$ and $SiO_2/TEOS/SiO_2/Al-1%Si$ multilevel thin films was investigated using dynamic SIMS(secondary ion mass spectrometry) analysis. DC magnetron sputter, APCVD and PECVD t

키워드 Na;gettering;passivation;dynamic SIMS;