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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 52(2); 2019
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2019;52(2):84-89. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2019.52.2.84
RF sputter를 이용한 실리카 증착 고 내구성 반사 방지막 제조
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한국기계연구원 부설 재료연구소;한국기계연구원 부설 재료연구소;한국기계연구원 부설 재료연구소;한국기계연구원 부설 재료연구소;
초록
We fabricated durable anti-reflective(AR) layer with silica globular coating on polymer by two steps. Firstly, nano-protrusions of polymer were formed by plasma etching known as R.I.E(reactive ion etching) process. Secondly, silica globular coating was de
키워드 Durability;Anti-Reflection(AR);Silica nanoparticle;RF Magnetron Sputter;