Aug, 31, 2024

Vol.57 No.4

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 52(4); 2019
  • Article

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KISE Journal of Korean Institute of Surface Engineering 2019;52(4):211-226. Published online: Nov, 30, -0001

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DOI : 10.5695/JKISE.2019.52.4.211

Pulsed DC 마그네트론 스퍼터링으로 제조된 다층 광학박막의 특성

  • 김동원;
    경기대학교 신소재공학과;
초록

Optical thin films were deposited by using a reactive pulsed DC magnetron sputtering method with a high density plasma(HDP). In this study, the effect of sputtering process conditions on the microstructure and optical properties of $SiO_2$,

키워드 antireflection film;Pulsed DC magnetron sputtering;multi-layer optical thin film;$SiO_2$ film;$Nb_2O_5$ film;