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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 52(4); 2019
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2019;52(4):227-232. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2019.52.4.227
Cu 첨가가 Mo-Cu-N 코팅의 미세구조와 기계적 특성에 미치는 영향
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성신여자대학교 청정융합과학과;한국생산기술연구원 열처리그룹;한국생산기술연구원 열처리그룹;한국생산기술연구원 열처리그룹;성신여자대학교 청정융합과학과;
초록
Mo-N based coatings have been studied for enhancing mechanical characteristics of thin films. In the case of Mo-X-N coatings, the microstructure and mechanical properties can be affected by the addition of the third element. In this work, Mo-Cu-N coatings
키워드 Mo-Cu-N;Cu content;Sputtering;Nanocomposite coating;Thin film;