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- KISE Journal of Korean Institute of Surface Engineering
- Volume 52(6); 2019
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2019;52(6):289-292. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2019.52.6.289
Effect of a ZnO Buffer Layer on the Structural, Optical and Electrical Properties of TIO/ZnO Bi-layered Films
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School of Materials Science and Engineering, University of Ulsan;School of Materials Science and Engineering, University of Ulsan;School of Materials Science and Engineering, University of Ulsan;School of Materials Science and Engineering, University of U
초록
Transparent and conducting titanium doped indium oxide (TIO) thin films were deposited by RF magnetron sputtering on zinc oxide (ZnO)-coated glass substrates to investigate the effect of the ZnO buffer layer on optical and electrical properties of TIO/ZnO
키워드 ZnO;TIO;Magnetron sputtering;Hall effect;Figure of merit;