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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 53(1); 2020
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2020;53(1):9-14. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2020.53.1.9
RF 마그네트론 스퍼터링법으로 성장시킨 CuS 박막의 구조적 및 광학적 특성
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부산대학교 재료공학과;부산대학교 재료공학과;신라대학교 신소재공학부;부산대학교 재료공학과;신라대학교 신소재공학부;
초록
CuS (copper sulfide) thin films having the same thickness of 100nm were deposited on the glass substrates using by radio frequency (RF) magnetron sputtering method. RF powers were applied as a process variable for the growth of CuS thin films. The structu
키워드 Covellite;CuS thin film;RF magnetron sputtering;deposition power;solar cell;