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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 53(3); 2020
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2020;53(3):104-108. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2020.53.3.104
Au 층간박막 두께에 따른 ZnO 박막의 전기광학적 특성 변화
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울산대학교 첨단소재공학부;울산대학교 첨단소재공학부;한국생산기술연구원 첨단정형공정그룹;한국생산기술연구원 첨단정형공정그룹;울산대학교 첨단소재공학부;울산대학교 첨단소재공학부;
초록
ZnO single layer films (100 nm thick) and Au intermediated ZnO films (ZnO/Au/ZnO; ZAZ) were deposited on the glass substrate by RF and DC magnetron sputtering at room temperature and then the influence of the Au interlayer on the electrical and optical pr
키워드 ZnO;Au;Sheet resistance;Visible transmittance;Optical band gap;