Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 53(3); 2020
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2020;53(3):109-115. Published online: Nov, 30, -0001

PDF Full Text XML

DOI : 10.5695/JKISE.2020.53.3.109

a-plane 사파이어기판에 증착된 Polycrystalline Diamond 박막의 특성

  • 싱얀탄;장태환;권진욱;김태규;
    부산대학교 나노융합기술학과;부산대학교 나노융합기술학과;부산대학교 나노융합기술학과;부산대학교 나노메카트로닉스공학과;
초록

In this study, polycrystalline diamond was synthesized by chemical vapor deposition (CVD). Diamond films were deposited on a-plane sapphire substrates while changing the concentration of methane for hydrogen (CH4/H2), and the concent

키워드 a-plane sapphire substrate;Polycrystalline Diamond;MPECVD;Raman spectra;XRD;AFM;