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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 53(4); 2020
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2020;53(4):169-181. Published online: Nov, 30, -0001
DOI : 10.5695/JKISE.2020.53.4.169
원자층증착법으로 증착된 강유전성 플루오라이트 구조 강유전체 박막의 불순물 효과
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부산대학교 재료공학부;부산대학교 재료공학부;부산대학교 재료공학부;부산대학교 재료공학부;
초록
The ferroelectricity in emerging fluorite-structure oxides such as HfO2 and ZrO2 has attracted increasing interest since 2011. Different from conventional ferroelectrics, the fluorite-structure ferroelectrics could be reliably scaled
키워드
Ferroelectric;Impurity;Polymorphism;