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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 54(3); 2021
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2021;54(3):119-123. Published online: Jan, 3, 2022
DOI : 10.5695/JKISE.2021.54.3.119
Ag 중간층이 SnO2 박막의 광학적, 전기적 특성에 미치는 영향
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a울산대학교 첨단소재공학부 b한국생산기술연구원 동남본부 에너지소재부품연구그룹 c한국생산기술연구원 울산본부 첨단정형공정그룹
초록
SnO2 single layer and SnO2/Ag/SnO2 (SAS) tri-layered films were deposited on the glass substrate by RF and DC magnetron sputtering at room temperature and then the effect of Ag interlayer on the opto-electrical performance of the films were considered. As
키워드 SnO2, Ag, Sheet resistance, XRD, AFM.