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- KISE Journal of Korean Institute of Surface Engineering
- Volume 54(3); 2021
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2021;54(3):133-138. Published online: Jan, 3, 2022
DOI : 10.5695/JKISE.2021.54.3.133
Effect of Negative Substrate Bias Voltage on the Microstructure and Mechanical Properties of Nanostructured Ti–Al–N–O Coatings Prepared by Cathodic Arc Evaporation
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Korea Institute of Industrial Technology (KITECH), Yangsan 50623, Republic of Korea
초록
Ternary Ti–X–N coatings, where X = Al, Si, Cr, O, etc., have been widely used for machining tools and cutting tools such as inserts, end-mills, and etc. Ti–Al–N–O coatings were deposited onto silicon wafer and WC-Co substrates by a cathodic arc evaporati
키워드 Ti–Al–N–O Coatings, Substrate bias voltage, Cathodic arc evaporation, Microstructure