학회 연락처
- +82-2-563-0935
- +82-2-558-2230
- submission@kssse.or.kr
- https://www.kssse.or.kr/
상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 54(6); 2021
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2021;54(6):302-306. Published online: Jan, 6, 2022
DOI : 10.5695/JKISE.2021.54.6.302
전자빔 표면 조사에 따른 SnO2/Ag/SnO2 박막의 특성 연구
-
a 울산대학교 첨단소재공학부 b 한국생산기술연구원 동남본부 첨단하이브리드생산기술센터 c 한국생산기술연구원 울산본부 첨단정형공정그룹
초록
SnO2 30/Ag 15/SnO2 30 nm(SAS) tri-layer films were deposited on the glass substrates with RF and DC magnetron sputtering and then electron beam is irradiated on the surface to investigate the effect of electron bombardment on the opto-electrical perform
키워드 SnO2, Ag, Electron irradiation, X-ray diffraction, Figure of merit