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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 54(6); 2021
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2021;54(6):348-356. Published online: Jan, 6, 2022
DOI : 10.5695/JKISE.2021.54.6.348
수평형 유도결합 플라즈마를 이용한 그래핀의 질소 도핑에 대한 연구
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강원대학교 대학원 신소재공학과
초록
In this study, optical diagnosis of plasma was performed for nitrogen doping in graphene using a horizontal inductively coupled plasma (ICP) system. Graphene was prepared by mechanical exfoliation and the ICP system using nitrogen gas was ignited for plas
키워드 Graphene, Defect-suppressed doping, Inductively coupled plasma, Optical emission spectroscopy, Electron excitation temperature