Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
논문 상세 검색
학회 연락처

상세보기

  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 54(6); 2021
  • Article

상세보기

KISE Journal of Korean Institute of Surface Engineering 2021;54(6):357-364. Published online: Jan, 6, 2022

PDF Full Text XML

DOI : 10.5695/JKISE.2021.54.6.357

PECVD를 이용한 DLC 박막의 표면 마모 특성 향상을 위한 플루오린 첨가의 영향

  • 박현준ab, 김준형c, 문경일a*
    a한국생산기술연구원, b인하대학교 신소재공학과, c㈜풍산
초록

In this study, DLC films deposited by PECVD were evaluated to the properties of super-hydrophobic by CF4 treatment. The structure of DLC films were confirmed by Raman Spectra whether or not mixed sp3 (like diamond) peak and sp2 (like graphite) peak. And t

키워드 PECVD, F-DLC, Super-hydrophobic, CF4