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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 54(6); 2021
  • Article

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KISE Journal of Korean Institute of Surface Engineering 2021;54(6):365-370. Published online: Jan, 6, 2022

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DOI : 10.5695/JKISE.2021.54.6.365

세정공정에 따른 Y2O3 코팅부품의 내플라즈마성 영향

  • 김민중a,b, 신재수c, 윤주영b,d,*
    a한양대학교 전기공학과, b한국표준과학연구원 진공소재측정팀 c대전대학교 에너지신소재공학과, d과학기술연합대학원대학교 NT-IT 융합
초록

In this research, we proceeded with research on plasma resistance of the cleaning process of APS(Atmospheric Plasma Spray)-Y2O3 coated parts used for semiconductor and display plasma process equipment. CF4, O2, and Ar mixed gas were used for the plasma e

키워드 Plasma corrosion resistance, Spray coating, Cleaning, Contamination particle