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KISE Journal of Korean Institute of Surface Engineering 2022;55(2):70-76. Published online: May, 2, 2022
DOI : 10.5695/JSSE.2022.55.70
In this paper, we compared the properties of the chromium nitride (CrN) films prepared by inductively coupled plasma magnetron sputtering (ICPMS). As a comparison, CrN film prepared by a direct current magnetron sputtering (dcMS) is also studied. The cry
키워드 Inductively coupled plasma; Corrosion resistance; Chromium Nitride