Aug, 31, 2024

Vol.57 No.4

최신논문 논문목록
논문검색
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학회 연락처

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 55(2); 2022
  • Article

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KISE Journal of Korean Institute of Surface Engineering 2022;55(2):77-83. Published online: May, 2, 2022

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DOI : 10.5695/JSSE.2022.55.2.77

유도결합 플라즈마 파워에 따른 MoN 코팅막의 결정구조 및 기계·전기적 특성 변화

  • 장훈, 전성용*
    목포대학교 신소재공학과
초록

Nanocrystalline MoN coatings were prepared by inductively coupled plasma magnetron sputtering (ICPMS) changing the plasma power from 0 W to 200 W. The properties of the coatings were analyzed by x-ray diffraction, field emission scanning electron microsco

키워드 Inductively coupled plasma; Υ-Mo2N; Crystal structure; Roughness; Electrical resistivity