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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 55(2); 2022
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2022;55(2):91-95. Published online: May, 2, 2022
DOI : 10.5695/JSSE.2022.55.2.91
Ag 중간층 두께에 따른 ZnO 박막의 광학적, 전기적 특성 연구
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a울산대학교 첨단소재공학부 b한국생산기술연구원 동남본부 첨단하이브리드생산기술센터
초록
ZnO single layer (60 nm thick) and ZnO with Ag interlayer (ZnO/Ag/ZnO; ZAZ) films were deposited on the glass substrates by using radio frequency (RF) and direct current (DC) magnetron sputter to evaluate the effectiveness of Ag interlayer on the optical
키워드 ZnO/Ag/ZnO; Magnetron sputtering; Visible transmittance; Electrical resistivity.