학회 연락처
- +82-2-563-0935
- +82-2-558-2230
- submission@kssse.or.kr
- https://www.kssse.or.kr/
상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 15(3); 1982
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 1982;15(3):138-145. Published online: Nov, 30, -0001
초연합금절단공구상에 TiN의 화학증착피막에 관한 연구
-
부산대학교 공과대학 금속공학과;
초록
The effects of the simultaneous variations of the ratio of feed gases(H2/N2 Flow ratio), feed gas flow rate (H2/N2, total-flow rate) and partial pressures of TiCl4 (PTiCl41) as well as deposition time and cobalt content of the substrate on the deposition
키워드