Aug, 31, 2024

Vol.57 No.4

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  • KISE Journal of Korean Institute of Surface Engineering
  • Volume 55(5); 2022
  • Article

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KISE Journal of Korean Institute of Surface Engineering 2022;55(5):284-291. Published online: Nov, 14, 2022

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DOI : 10.5695/JSSE.2022.55.5.284

마그네트론 스퍼터링법으로 제조된 ZnO/Cu/Al2O3 투명 면상 발열체 연구

  • 민창흠, 최두호*
    동의대학교 신소재공학부
초록

Herein, we studied ultrathin Cu-layer-based transparent heaters embedded between a ZnO underlayer and an Al2O3 overlayer. The anti-reflecting functions for the ZnO and Al2O3 layers by independently varying the layer thicknesses, with the Cu layer thicknes

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