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상세보기
- KISE Journal of Korean Institute of Surface Engineering
- Volume 55(6); 2022
- Article
상세보기
KISE Journal of Korean Institute of Surface Engineering 2022;55(6):353-362. Published online: Dec, 29, 2022
DOI : 10.5695/JSSE.2022.55.6.353
Pulsed DC 마그네트론 스퍼터링으로 제조한 소다라임 유리의 고투과 및 대전방지 박막특성 연구
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한국공학대학교 신소재공학과
초록
Recently, transmittance of photomasks for ultra-violet (UV) region is getting more important, as the light source wavelength of an exposure process is shortened due to the demand for technologies about high integration and miniaturization of devices. Mean
키워드 Reactive DC magnetron sputtering, Antireflection coatings, Antistatic coatings, Transparent conductive coatings, Electrostatic damage.